| 高性能聚焦离子束技术的应用 |
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| 引用本文： | 周伟敏. 高性能聚焦离子束技术的应用[J]. 理化检验(物理分册), 2004, 40(9): 453-456 |
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| 作者姓名： | 周伟敏 |
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| 作者单位： | 上海交通大学金属基复合材料国家重点实验室,上海,200030 |
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| 摘 要： | 叙述了采用液态镓作为离子源的高性能聚焦离子束系统(FIB)在材料科学研究领域中的作用。该系统有三大用途：形貌观察；分辨率高达5nm；微刻蚀以及微沉淀。详细地介绍了利用FIB进行形貌观察、制备TEM样品和表面刻蚀的过程及实验结果。
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| 关 键 词： | 聚焦离子束（FIB） 透射电子显微分析（TEM） 二次离子像（SIM） 样品制备 |
| 文章编号： | 1001-4012(2004)09-0453-04 |
THE APPLICATION OF HIGH RESOLUTION FOCUSED ION BEAM (FIB)TECHNIQUE |
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| of Metal Matrix Composites,Shanghai Jiao Tong University,Shanghai ,China). THE APPLICATION OF HIGH RESOLUTION FOCUSED ION BEAM (FIB)TECHNIQUE[J]. Physical Testing and Chemical Analysis Part A:Physical Testing, 2004, 40(9): 453-456 |
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| Authors: | of Metal Matrix Composites Shanghai Jiao Tong University Shanghai China) |
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| Affiliation: | of Metal Matrix Composites,Shanghai Jiao Tong University,Shanghai 200030,China) |
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| Abstract: | Focused ion beam(FIB) system based on gallium liquid-metal ion sources has become a useful tool in the research work of materials science It has three intended use, that is magnified observation with the resolution imaging as high as 5 nanometer, micro-etching and micro-deposition. In this paper we present several examples for the applications of FIB techniques. The unique feature of FIB for materials scientists is that it can prepare TEM sample, which may be extremely difficult to be prepared by conventional means, with high speed and accuracy. Here we introduce the process of preparing a TEM sample by FIB. |
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| Keywords: | Focused Ion beams (FIB) Analysis of transmission electron microscopy (TEM) Secondary ion image (SIM) Sample preparation |
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