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微小凹坑阵列的电解转印加工试验研究
引用本文:宋曼,曲宁松,钱双庆,李寒松,杨培剑. 微小凹坑阵列的电解转印加工试验研究[J]. 电加工与模具, 2009, 0(5): 30-34
作者姓名:宋曼  曲宁松  钱双庆  李寒松  杨培剑
作者单位:南京航空航天大学江苏省精密与微细制造技术重点实验室,江苏南京,210016
基金项目:国家自然科学基金资助项目,江苏省基金,国家高技术研究发展计划资助项目 
摘    要:研究表明,合理的表面织构可改善活塞汽缸中摩擦副的润滑特性,提高抗磨减摩性能.试验了用电解转印法加工凹坑阵列,对加工中阴阳极之间的封闭区域建立数学模型,并进行了ANSYS电场分析.试验研究了阴极掩模胶膜厚度、加工间隙、加工电压对微坑形貌的影响,通过优化加工参数,提高了微小凹坑阵列的均匀性与微坑加工精度.采用光刻工艺制备了直径为10 μm、厚度为40 μm的阴极掩模,以此进行电解转印加工,可获得平均直径为140 μm、深度为30 μm的凹坑阵列.

关 键 词:微坑阵列  电解加工  表面织构  摩擦

Experimental Study of Machining Array Micro-pits in Electrochemical Machining Method with a Mask onto the Cathode
Song Man,Qu Ningsong,Qian Shuangqing,Li Hansong,Yang Peijian. Experimental Study of Machining Array Micro-pits in Electrochemical Machining Method with a Mask onto the Cathode[J]. Electromachining & Mould, 2009, 0(5): 30-34
Authors:Song Man  Qu Ningsong  Qian Shuangqing  Li Hansong  Yang Peijian
Affiliation:Song Man,Qu Ningsong,Qian Shuangqing,Li Hansong,Yang Peijian (Nanjing University of Aeronautics & Astronautics,Nanjing 210016,China)
Abstract:It has been identified that the reasonable surface texturing can p romote friction characteristics of a lubricating film in the cylinder piston.In this paper,an electrochemical machining method with a mask onto the cathode is employed to produce the micro-pits array patterns.The mathematical model of the enclosed area between the cathode and anode is established for the ANSYS analysis of the electric field.The effects of the cathode film thickness,the processing voltage,and the cathode-anode gap on the prof...
Keywords:micro-pits array  ECM  surface texturing  friction  
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