| 物理气相沉积技术的研究进展与应用 |
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| 引用本文： | 吴笛. 物理气相沉积技术的研究进展与应用[J]. 机械工程与自动化, 2011, 0(4) |
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| 作者姓名： | 吴笛 |
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| 作者单位： | 兰州石化职业技术学院机械工程系,甘肃兰州,730060 |
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| 摘 要： | 介绍了物理气相沉积技术的新工艺、新进展及其特点,总结了物理气相沉积技术的一些新应用.指出特殊功能复合膜的制备、复合膜的研究与应用以及超硬膜制备将是物理气相沉积技术今后研究的重点.
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| 关 键 词： | 物理气相沉积 沉积 薄膜 |
Application and Development of Physical Vapor Deposition Technology |
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| WU Di. Application and Development of Physical Vapor Deposition Technology[J]. Mechanical Engineering & Automation, 2011, 0(4) |
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| Authors: | WU Di |
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| Affiliation: | WU Di(Department of Mechanical Engineering,Lanzhou Petrochemical College of Vocational Technology,Lanzhou 730060,China) |
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| Abstract: | A brief introduction to the new methods of physical vapor deposition is made and the application status of physical vapor deposition is summed up.At last,the paper points out the preparation of composite file with special function,the application of composite file and the preparation of super hard film will be the developing direction of physical vapor deposition. |
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| Keywords: | physical vapor deposition deposition film |
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