直线电机气浮精密平台的设计与控制

高精度综合测量仪在工作中要求达到亚微米级的运动精度,为此建立了X Z直线电机气浮精密运动平台,对气浮导轨设计、直线电机控制等关键技术进行了研究.采用有限元设计法设计了气浮导轨,实验结果表明,采用该方法设计的气浮导轨具有较高的承载能力和刚度.提出一种改进的PID控制策略,从而改善直线电机运动平台的抗干扰能力,并使其获得较高的稳态位置精度.实验结果显示,在采用这种控制方法后,直线电机气浮精密平台的定位精度可达到0.5μm.

Design and Control of Air Bearing Precision Positioning Stage Driven by Liner Motor

The high-precision measuring instrument required achieving submicron movement,so an X-Z air bearing precise positioning stage driven by liner motor was established.Some key techniques,including design method of aerostatic guide and control of liner motor,were studied.The aerostatic guide was designed by finite element method.Experimental results show that the aerostatic guide have high load capability and stiffness.In order to improve stage＇s positioning accuracy,the tracking performance and interference rejection of liner motor must be improved.So an improved PID control strategy was proposed to improve anti-interference ability and access high position accuracy.Experimental results show that in using this control method,the positioning accuracy can reach 0.5 μm.