Enhanced Performance of MoS2 Photodetectors by Inserting an ALD‐Processed TiO2 Interlayer |
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| Authors: | Yusin Pak Woojin Park Somak Mitra Assa Aravindh Sasikala Devi Kalaivanan Loganathan Yogeenth Kumaresan Yonghun Kim Byungjin Cho Gun‐Young Jung Muhammad M Hussain Iman S Roqan |
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| Affiliation: | 1. Physical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia;2. Computer Electrical Mathematical Science and Engineering, King Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia;3. School of Materials Science and Engineering, Gwangju Institute of Science and Technology (GIST), Buk‐gu, Gwangju, Republic of Korea;4. Department of Advanced Functional Thin Films, Surface Technology Division, Korea Institute of Materials Science (KIMS), Sungsan‐gu, Changwon, Gyeongnam, Republic of Korea;5. Department of Advanced Material Engineering, Chungbuk National University, Seowon‐gu, Cheongju, Chungbuk, Republic of Korea |
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| Abstract: | 2D molybdenum disulfide (MoS2) possesses excellent optoelectronic properties that make it a promising candidate for use in high‐performance photodetectors. Yet, to meet the growing demand for practical and reliable MoS2 photodetectors, the critical issue of defect introduction to the interface between the exfoliated MoS2 and the electrode metal during fabrication must be addressed, because defects deteriorate the device performance. To achieve this objective, the use of an atomic layer‐deposited TiO2 interlayer (between exfoliated MoS2 and electrode) is reported in this work, for the first time, to enhance the performance of MoS2 photodetectors. The TiO2 interlayer is inserted through 20 atomic layer deposition cycles before depositing the electrode metal on MoS2/SiO2 substrate, leading to significantly enhanced photoresponsivity and response speed. These results pave the way for practical applications and provide a novel direction for optimizing the interlayer material. |
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| Keywords: | atomic layer deposition interlayer molybdenum disulfide photodetectors titanium dioxide |
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