基于MEMS技术的人造视网膜传感器系统设计

电刺激视网膜相关组织是现阶段治疗视网膜色素变性和黄斑病变的一种新途径,运用微加工技术,通过人造视网膜传感芯片替代受损的视网膜细胞恢复视觉是可行的,植入芯片具有微型化、柔性化及生物兼容性等特点。通过模拟仿真实验验证,设计了一种新型的视网膜传感芯片,给出了该芯片的材料选择、工艺过程及最终的结构参数,选择Polyimide作为芯片衬底及绝缘材料,Parylene-C作为芯片封装保护材料,金作为电极和引线材料。

Design of artificial retinal transducer system based on MEMS technology

Electrical stimulation of the remaining retinal neurons to restore useful vision is recently proposed in patients with retinitis pigmentosa or macular degeneration. Using the potentials of microsystem technology, neural prosthesis become feasible which are implanted in the eyes. The active microimplants demand a high degree of device miniaturization without compromising design flexibility and biocompatibility requirements. Experimental verification is made through analogue emulation. In order to overcome the brittleness of silicon, a kind of light- weight and highly flexible Polyimide-based device is proposed. Results are given on the material selection for substrate materials and the design for flexible stimulation devices. Polyimide is used as substrate and insulation layers, silicone and Parylene-C as coating materials, and gold as electrode material.