大口径碳化硅材料凸非球面反射镜检验技术

为了实现某大口径碳化硅材料凸非球面反射镜检验，研究了无像差点法以及补偿检验法方案，经过方案比较优选，确定选用补偿检验方案并专门设计了高精度大口径非球面补偿器，设计精度为PV：0.0082，RMS：0.0029（=0.6328nm），采用会聚光束、使用大口径数字干涉仪进行凸非球面正面检测，采用该方法进行检验凸非球面反射镜最终检测结果为0.022（RMS）本文所述补偿器的设计方法和要求具有普遍性，设计结果也可用于同类型大口径凸非球面检验用补偿器的设计。采用该方法提高了凸非球面检测精度，并且在凸非球面镜的材料选择、结构设计、支撑方式等方面提供了更多的优化空间，为新型光学材料在凸非球面反射镜的应用铺平了道路。

Testing technology for large aperture SiC asphere mirror

In order to realize testing of a large aperture SiC convex asphere, ,aberration free testing method and compensator tesing method are analyzed. After majorized comparison, null lens testing method is selected. Offner null lens for large SiC Convex asphere are designed．The design results indicate that the precision of the system’s is PV：0.0082，RMS：0.0029（=0.6328nm）， large aperture zygo interferometer is used and convergent testing method is adapted . The final testing results or the mirror is 0.022（RMS）. Th e design method is universal and the design results can be used in the compensator design for other convex SiC mirror．The testing result of convex asphere is improved, the selection of the material and supporting structure etc. is majorized, it give more chance for new style of convex asphere mirror.