| 多弧离子镀(Cr,Ti,Al,Zr)N多组元超硬梯度膜的结构及性能 |
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| 引用本文： | 崔贯英,张钧,吕会敏.多弧离子镀(Cr,Ti,Al,Zr)N多组元超硬梯度膜的结构及性能[J].材料保护,2010,43(6). |
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| 作者姓名： | 崔贯英 张钧 吕会敏 |
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| 作者单位： | 沈阳大学机械工程学院,辽宁,沈阳,110044;沈阳大学机械工程学院,辽宁,沈阳,110044;沈阳大学机械工程学院,辽宁,沈阳,110044 |
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| 基金项目： | 沈阳市2009年科技计划项目(1091178-1-00) |
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| 摘 要： | (Cr,Ti,Al,Zr)N梯度膜性能优异。采用多弧离子镀技术,使用Ti-Al-Zr合金靶和Cr单质靶在高速钢表面制备(Cr,Ti,Al,Zr)N多元超硬梯度膜,利用扫描电镜、能谱、X射线衍射仪、硬度计、划痕仪对膜层形貌、成分、结构、硬度、附着力进行分析,并通过热震性能试验考察了膜层的抗热震性能。结果表明:制备的膜层为面心立方结构,择优生长取向为(220)面;与TiN,(Ti,Al)N,(Ti,Cr)N,(Ti,Al,Zr)N等硬质膜相比,制备的(Cr,Ti,Al,Zr)N多元梯度膜具有更高的硬度和膜/基附着力,硬度可达4400HV,膜/基附着力大于200N,实现了从硬质膜到超硬膜的转变;膜层中N含量梯度可有效减少应力集中,Cr,Al含量的增加有利于提高膜层抗热震性能;负偏压对膜层硬度影响较大,对膜层成分、结构、抗热震性能影响较小,对膜/基附着力基本无影响。
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| 关 键 词： | 多弧离子镀 (Cr Ti Al Zr)N超硬梯度膜 硬度 膜/基附着力 热震性能 |
Microstructure and Properties of(Cr,Ti,Al,Zr)N Multi-Component Super-Hard Gradient Films Deposited by Multi-Arc Ion Plating |
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| CUI Guan-ying,ZHANG Jun,LV Hui-min.Microstructure and Properties of(Cr,Ti,Al,Zr)N Multi-Component Super-Hard Gradient Films Deposited by Multi-Arc Ion Plating[J].Journal of Materials Protection,2010,43(6). |
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| Authors: | CUI Guan-ying ZHANG Jun LV Hui-min |
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| Affiliation: | CUI Guan-ying,ZHANG Jun,LV Hui-min( College of Mechani-cal Engineering,Shenyang University,Shenyang 110044,Chi-na) |
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| Abstract: | (Cr,Ti,Al,Zr)N multi-component super-hard gradient films were prepared from Ti-Al-Zr alloy targets and Cr targets by using multi-arc ion plating (MAIP) technology.The morphology,com-position,microstructure,hardness and adhesion to substrate of the films were analyzed by using scanning electron microscope,energy dispersive spectrometer,X-ray diffractomter,hardness meter and scratch tester.Besides,the thermal shock resistance of the films was evaluated.Results indicate that ( Cr,Ti,Al,Zr) N multi-component su... |
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| Keywords: | multi-arc ion plating (Cr Ti Al Zr)N super-hard gradient film hardness adhesion to substrate thermal shock re-sistance |
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