| 基于空气轴承的高精度圆度测量系统设计 |
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| 引用本文： | 赵午云,陶继忠,彭万欢. 基于空气轴承的高精度圆度测量系统设计[J]. 机械工程师, 2009, 0(11): 54-55 |
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| 作者姓名： | 赵午云 陶继忠 彭万欢 |
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| 作者单位： | 中国工程物理研究院机械制造工艺研究所,四川绵阳621900 |
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| 摘 要： | 利用高精度空气静压轴承和非接触位移传感器，设计了一套圆度测量系统，可以实现外圆柱面圆度的精密测量。该系统的圆度测量结果与英国TaylorHobson公司的高精度圆度仪测量结果对比表明，可以达到0．1μm以下的测量精度。多次测量证明，该系统测量结果重复性好、可信性高。
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| 关 键 词： | 空气轴承 圆度 测量 设计 |
Design of the High-precision Circularity Measure System Based on Air Bearings |
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| ZHAO Wu-yun,TAO Ji-zhong,PENG Wan-huan. Design of the High-precision Circularity Measure System Based on Air Bearings[J]. Mechanical Engineer, 2009, 0(11): 54-55 |
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| Authors: | ZHAO Wu-yun TAO Ji-zhong PENG Wan-huan |
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| Affiliation: | (Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Mianyang 621900, China) |
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| Abstract: | The paper used high-precision air bearings and non-contact displacement sensor to design a system for measure circularity. The system （：an measure exact columnar surface.After comparing measurement result with the alike kind equipment of U.K. Taylor Hohson company, the result is appropinquity. The high-precision circularity measure system can attain 0.1μm measurement accuracy, the results have good repeatability and high creditability. |
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| Keywords: | air bearing circularity measure design |
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