| 微电子机械技术的研究和发展趋势 |
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| 引用本文： | 余丹铭,梁利华,许杨剑. 微电子机械技术的研究和发展趋势[J]. 机械工程师, 2004, 0(7): 13-16 |
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| 作者姓名： | 余丹铭 梁利华 许杨剑 |
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| 作者单位： | 浙江工业大学,机电工程学院,浙江,杭州,310032 |
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| 摘 要： | MEMS技术作为一门新兴的技术，越来越受到世界各国的重视。文中主要阐述了MEMS的研制背景、加工工艺、现状和发展趋势，并对MEMS技术面临的问题进行了简要分析。
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| 关 键 词： | 微电子机械系统 微传感器 发展趋势 |
| 文章编号： | 1002-2333(2004)07-0013-04 |
| 修稿时间： | 2004-02-10 |
Research and Development of MEMS Technology |
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| YU Dan-ming,LIANG Li-hua,XU Yang-jian. Research and Development of MEMS Technology[J]. Mechanical Engineer, 2004, 0(7): 13-16 |
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| Authors: | YU Dan-ming LIANG Li-hua XU Yang-jian |
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| Abstract: | MEMS(Micro Electro Mechanical Systems)technology is an emerging technology. It is taken more and more seriously both inside and outside the country. In this paper, background, processing technique and developing status of MEMS are introduced summarily. Trend is analyzed. Then the problems of MEMS are concisely reviewed. |
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| Keywords: | MEMS microsensor developing trend |
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