沉积温度对高性能TiAlN涂层微观结构和力学性能的影响

采用真空电弧离子镀（AIP）技术在不同沉积温度下TiAlN涂层，用于高性能制造，并研究了沉积温度与表面性能的关系。结果表明，由于离子轰击作用，表面大颗粒随沉积温度的升高而减少。随着沉积温度的升高，涂层表面的晶粒尺寸先急剧减小后逐渐增大。此外，沉积温度对合成涂层的相组成和化学成分影响不大。随着沉积温度的升高，硬度和粘结强度先迅速增加，后逐渐降低。当沉积温度在450℃左右时，沉积的TiAlN涂层硬度最高，粘结强度最大。上述现象的发生机理与沉积过程中表面与界面之间的微观组织和残余应力的变化有关。合成的涂层在高达900℃的空气中具有良好的热稳定性。

Influence of Deposition Temperature on Microstructure and Mechanical Properties of TiAlN Coatings for High Performance Manufacture

TiAlN coatings were deposited at various deposition temperatures using vacuum arc ion plating (AIP) for the high performance manufacture. The relationships between deposition temperatures and surface properties were investigated. Results show that surface macroparticles (MPs) decrease in number and size with increasing the deposition temperature because of ion bombardment. When deposition temperature increases, the grain size on the top coating first decreases sharply, and then increases gradually. Furthermore, deposition temperature has little influence on the phase constituents and chemical compositions of the resultant coatings. With raising the deposition temperature, the hardness and adhesion strength first increase rapidly, and then decrease gradually. The deposited TiAlN coating exhibits the highest hardness and the strongest adhesion strength when deposition temperature is set at around 450 °C. The mechanism of the above phenomena is attributed to the variations of microstructure and residual stress between the surface and interface during the deposition process. The resultant coatings have a good thermal stability in air at temperatures up to 900 °C.