| 氧化钨厚膜气敏传感器的气氛改性研究 |
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| 引用本文： | 徐宇兴,唐子龙,张中太.氧化钨厚膜气敏传感器的气氛改性研究[J].功能材料,2009,40(2). |
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| 作者姓名： | 徐宇兴 唐子龙 张中太 |
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| 作者单位： | 清华大学,材料系新型陶瓷与精细工艺国家重点实验室,北京,100084;清华大学,材料系新型陶瓷与精细工艺国家重点实验室,北京,100084;清华大学,材料系新型陶瓷与精细工艺国家重点实验室,北京,100084 |
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| 基金项目： | 国家重点基础研究发展规划(973计划) |
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| 摘 要： | 采用丝网印刷法将钨酸分解得到的氧化钨粉末制备成氧化钨厚膜气敏传感器,并先后在氢气和空气气氛中进行还原和氧化处理,系统研究了氢气浓度和氧化时的升温速率对敏感膜的形貌、结构和CO气敏性能的影响.结果表明,经氢气还原-空气氧化后,敏感膜表面形貌由近似球形的颗粒转化为表面光滑两端开口的集束棒状或规则的四方柱状,而晶体结构则没有发生改变.敏感膜对CO的灵敏度(Rair/RCO)随CO浓度的增加和测试温度的升高而增大.与没有进行气氛改性的敏感膜相比,经10%H2气氛还原并在600℃空气中以5℃/min氧化处理后的敏感膜对CO具有最大的灵敏度,其对3.8×10-5CO的灵敏度提高了13.3倍.即通过对敏感膜进行气氛改性可显著提高对CO的敏感性能.
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| 关 键 词： | 氧化钨 气敏传感器 气敏性能 气氛改性 |
Study on atmosphere modification of gas sensing sensor based on tungsten oxide thick film |
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| XU Yu-xing,TANG Zi-long,ZHANG Zhong-tai.Study on atmosphere modification of gas sensing sensor based on tungsten oxide thick film[J].Journal of Functional Materials,2009,40(2). |
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| Authors: | XU Yu-xing TANG Zi-long ZHANG Zhong-tai |
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| Affiliation: | State Key Laboratory of New Ceramic and Fine Processing;Department of Materials Science and Engineering;Tsinghua University;Beijing 100084;China |
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| Abstract: | Gas sensing sensor based on tungsten oxide thick film has been prepared by screen printing technology using tungsten oxide powder decomposed by tungstic acid.The sensing film was reduced and oxidized in H2 and air,respectively.Effects of H2 concentration and heat treated speed on morphology,structure and CO gas sensing properties have been investigated in detail.The results indicate that the crystal grain changes to rodlike structure or tetragonal column from spherical grain,and the crystal structure has no... |
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| Keywords: | tungsten oxide gas sensor sensing properties atmosphere modification |
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