| 一种用于电子装备的硅片传输机械手 |
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| 引用本文： | 张世强,杨志.一种用于电子装备的硅片传输机械手[J].电子工业专用设备,2012,41(9):21-23,53. |
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| 作者姓名： | 张世强 杨志 |
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| 作者单位： | 中国电子科技集团公司第四十五研究所,北京,100176 |
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| 摘 要： | 机械手替代人工完成硅片传输可以大幅提高生产效率,传输精度和降低碎片率,机械手的使用是现代电子装备自动化的重要标志。介绍了适用于硅片传输的具有x、y、z、θ向运动功能的机械手及技术指标,重点从总体效率要求及负载对电机的受力进行详细计算,并对x、y向底座的设计做了详细描述;该机械手已应用于生产线的设备上,满足设计要求。
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| 关 键 词： | 机械手 电子装备 硅片传输 直线电机 |
A Wafer Transfer Manipulator Used in Electronic Equipment |
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| ZHANG Shiqiang,YANG Zhi.A Wafer Transfer Manipulator Used in Electronic Equipment[J].Equipment for Electronic Products Marufacturing,2012,41(9):21-23,53. |
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| Authors: | ZHANG Shiqiang YANG Zhi |
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| Affiliation: | (The 45th Research Institute of CETC,Beijing 100176,China) |
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| Abstract: | Manipulator used to replace the manual handing of wafer can significantly improve the efficiency of production,transmission accuracy,and reduce the fragment rate,the use of the manipulator is an important symbol of modern electronic equipment automation.The article introduces a manipulator with X,Y,Z,θmovement function,which is used on the silicon transmission,and the technical specification.it focuses on the requirements of the overall efficiency and the load on the motor to conduct a detailed calculation,and describes the X、Ybase in detail;the manipulator has used in production line equipment and met the demand. |
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| Keywords: | Manipulator Electronic equipment Silicon wafer transmission linear motor |
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