基于高温制备的氧化钙镁复合薄膜光电特性研究

采用电子束蒸镀工艺制备氧化钙掺杂氧化镁复合介质保护膜并深入分析了制备温度对该复合保护膜透过率及二次电子发射效率的影响。实验表明,高温制备能够使复合薄膜表面形貌更为致密,结晶粒径增加,薄膜的透过率和发光效率提高。当制备温度为300℃时,复合薄膜的形貌更为致密平整,裕度从25V增加到32V,发光效率从1.70lm/W提高到1.91lm/W,提高了12.35%。

Photoelectric properties of calcium and magnesium oxide films based on high reaction temperature

The calcium oxide doped magnesium oxide composite dielectric protective film was fabricated by electron beam evaporation. The influence of the fabrication temperature for the secondary electron emission of the composite dielectric protective film is studied. The experimental results show that the film processed by elevated temperature will be more compact, the grain size increases. The luminous efficiency will be improved and the transmittance of the film will be increased. When the processed temperature is 300℃, the formation of the composite film is more dense, the work gas voltage margin raises from 25 V to 32 V, the luminous efficiency increases from 1.70 lm/W to 1.91 lm/W, which is improved by 12.35%.