高过载姿态测量中MEMS陀螺失效模式与研究进展

高过载条件下姿态测量是一个公认的难题，其原因主要是角速度传感器难以经受高过载的冲击。基于微机电系统（MEMS）技术的陀螺作为解决高过载姿态测量问题的核心器件，其抗高过载能力直接制约着惯性导航系统在高过载环境中的应用。首先，介绍了弹药发射和侵彻两种典型高过载环境的特性，概括了在高过载环境中MEMS陀螺的响应类型；其次，总结了高过载条件下MEMS陀螺的失效模式，包括完全失效和功能性失效；然后，介绍了国内外在抗高过载MEMS陀螺方面的研究进展；最后，分别从器件设计和工程应用角度出发，提出了MEMS陀螺抗高过载的设计方法和应用思路。

Failure Modes and Research Progress of MEMS Gyroscope in High Overload Attitude Measurement

The attitude measurement under the conditions of high overload is a recognized problem, mainly because the angular velocity sensor is difficult to withstand the impact of high overload. The gyroscope based on micro electro mechanical system (MEMS) technology is the core device to solve the problem of attitude measurement of high overload. Its ability to resist high overload directly restricts the application of inertial navigation system in high overload environment. First, the characteristics of two typical high overload environments for ammunition launch and penetration are introduced, and the response types of MEMS gyroscope in high overload environments are summarized. Secondly, the failure modes of MEMS gyroscope under the conditions of high overload are summarized, including complete failure and functional failure. Then, the research progress of MEMS gyroscope with high overload resistance at home and abroad is introduced. Finally, from the perspective of device design and engineering applications, the design method and application ideas of MEMS gyroscope with high overload resistance are proposed.