Study on nanocrystalline Cr2O3 films deposited by arc ion plating: I. composition, morphology, and microstructure analysis |
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Authors: | Tie-Gang Wang Dawoon JeongSoo-Hyun Kim Qimin Wang Dong-Woo ShinSolveig Melin Srinivasan IyengarKwang Ho Kim |
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Affiliation: | a National Core Research Center for Hybrid Materials Solution, Pusan National University, Busan 609-735, South Koreab Division of Materials Engineering, Lund University, Box 118, SE-22100 Lund, Swedenc State Key Laboratory of Corrosion and Protection, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, PR Chinad Mechanical Materials & Parts Center, Busan Techno-Park, Busan 618-230, South Koreae School of Mechanical and Electronic Engineering, Guangdong University of Technology, Guangzhou 510006, PR Chinaf School of Nano & Advanced Materials Engineering, Gyeongsang National University, Gyeongnam 660-701, South Korea |
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Abstract: | Nanocrystalline Cr2O3 thin films were deposited on silicon wafers with (100) orientation by arc ion plating (AIP) technique at various negative bias voltages. By virtue of X-ray diffraction analysis, scanning electron microscope, and high-resolution transmission electron microscope, the influence of substrate bias voltage on the film growth process, microstructure, and characteristics was investigated systematically, including the phase constituents, grain size, lattice constant, chemical compositions, as well as surface and cross-section morphologies. With increasing the bias voltage, the grain size and lattice constant of AIP Cr2O3 films first decreased slightly, and then increased gradually again. Both reached the minimum (35 nm and 13.57 Å) when the bias voltage was − 100 V. However, the bias voltage had little effect on the phase constituents and chemical compositions of AIP Cr2O3 films. During the film growth process, the surfaces of Cr2O3 films were getting smoother with the negative bias voltage increase, in the meantime, their microstructures evolved from coarse columnar grains to fine columnar grains, short columnar recrystallized grains, and fine columnar grains again. |
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Keywords: | Cr2O3 film Arc ion plating Bias voltage Grain size Surface morphology HRTEM |
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