| 一种新型磁敏集成角度传感器及其测量系统 |
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| 引用本文： | 赖宗声,蔡彦,郑学军,贺德洪,郑筱莉.一种新型磁敏集成角度传感器及其测量系统[J].传感器与微系统,2001,20(1):28-30. |
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| 作者姓名： | 赖宗声 蔡彦 郑学军 贺德洪 郑筱莉 |
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| 作者单位： | 1. 华东师范大学 电子系,
2. 乌鲁木齐成人教育学院, |
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| 基金项目： | 国家科技攻关项目;96-748-02-02; |
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| 摘 要： | 研制了一种无触点的十字形两维集成垂直霍尔器件 ,它对平行于芯片表面的磁场敏感。当与被测转角θ的物件轴向相连的径向永久磁铁转动时 ,传感器给出了相对于被测角度的两种信号电压 ,通过接口电路和PC机组成的非接触式测量系统把信号转换为转角θ。测试结果表明该角度传感器及其测量系统的测量精度在 0°～ 36 0°范围内可达± 1°
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| 关 键 词： | 两维霍尔器件 集成磁传感器 角度测量系统 |
| 文章编号： | 1000-9787(2001)01-0028-03 |
| 修稿时间： | 2000年8月25日 |
A new magneto-sensitive integrated angular sensor and its measurement system |
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| LAI Zong-sheng,CAI Yan,ZHENG Xue-jun,HE De-hong,ZHENG Xiao-li.A new magneto-sensitive integrated angular sensor and its measurement system[J].Transducer and Microsystem Technology,2001,20(1):28-30. |
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| Authors: | LAI Zong-sheng CAI Yan ZHENG Xue-jun HE De-hong ZHENG Xiao-li |
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| Affiliation: | LAI Zong-sheng 1,CAI Yan 1,ZHENG Xue-jun 1,HE De-hong 1,ZHENG Xiao-li 2 |
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| Abstract: | A new contactless two-dimensional integrated Hall angular sensor is presented.A radial permanent magnet is attached to the axis whose angle position θ is to be determined. Two orthogonal vertical Hall devices in cross shape measure the magnetic field X,Y compornents paralled to the chip surface and therefore the angular position θ of the axis. When the permanent magnet rotates, the measured output voltages Vx,Vy by the two pairs of vertical Hall plates change correspondingly. The angle θ could be obtained by calculating the arc tangent of the signal ratio Vx/Vy through the interface circuit and PC processor. The experimental results show the whole angular mearement system has the angular measurement accuracy of ±1° over a full 360° operating range. |
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| Keywords: | two dimensional Hall device integrated magnetic sensor angle measurement system |
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