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基于压电驱动的靶球筛选操作机理及实验研究
引用本文:陈涛,陈立国,潘明强,王振华,王家畴,孙立宁.基于压电驱动的靶球筛选操作机理及实验研究[J].压电与声光,2012,34(1):56-60.
作者姓名:陈涛  陈立国  潘明强  王振华  王家畴  孙立宁
作者单位:1. 苏州大学机器人与微系统研究中心,江苏苏州 215021;中国科学院上海微系统与信息技术研究所传感技术国家重点联合实验室,上海 200050
2. 苏州大学机器人与微系统研究中心,江苏苏州,215021
3. 中国科学院上海微系统与信息技术研究所传感技术国家重点联合实验室,上海,200050
4. 哈尔滨工业大学机器人研究所,黑龙江哈尔滨,150001
基金项目:国家杰出青年基金资助项目,国家"八六三"计划基金资助项目,国家自然科学基金资助项目
摘    要:针对惯性约束聚变中靶球筛选操作的粘着问题,提出一种基于压电驱动控制的微操作方法,并结合微机电系统(MEMS)技术和微驱动方法,研制压电驱动操作模块用于实验研究.首先,分析微尺度对象粘着机理并进行粘着接触模型的建立,并在此基础上提出对操作工具施加振动,利用惯性力作用克服粘着力的动态操作方法;同时,结合靶球筛选操作的特点,分析操作控制策略;最后建立了基于压电驱动的微操作实验系统.针对直径Φ50~400 μm的靶球对象进行操作实验,成功实现了靶球样品的高效、准确拾取和释放,拾取和释放成功率大于90%.

关 键 词:惯性约束聚变  微操作  粘着  压电驱动

Research on the Filtrating Operation of Target Sphere based on the Control of Piezoelectric Actuator
CHEN Tao,CHEN Liguo,PAN Mingqiang,WANG Zhenhu,WANG Jiachou and SUN Lining.Research on the Filtrating Operation of Target Sphere based on the Control of Piezoelectric Actuator[J].Piezoelectrics & Acoustooptics,2012,34(1):56-60.
Authors:CHEN Tao  CHEN Liguo  PAN Mingqiang  WANG Zhenhu  WANG Jiachou and SUN Lining
Affiliation:1.Robotics and Microsystems Center,Soochow University,Suzhou 215021,China;2.State Key Lab.of Transducer Technology, Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China; 3.Robotics Institute,Harbin Institute of Technology,Harbin 150001,China)
Abstract:Aiming at the adhesion problems in the manipulation of target spheres used in the inertial confinement fusion,a method based on the control of piezoelectric actuator to manipulate micro spheres is presented in this paper.Combined with MEMS technology and the micro-driving method,a piezoelectric ceramics module has been developed for the experimental studies.Firstly,the adhesion mechanism of micro spheres is analyzed and the adhesion model for the micromanipulation is established.Based on the theory,the vibration is proposed to operate the micro spheres.The inertia force is used to overcome the adhesion force.The control strategy is conducted,and the micromanipulation system is set up.Finally,experiments are carried out through the manipulation of φ50~400 μm spheres.Experimental results show that this method can achieve repeatability better than 90% in the picking and releasing operation.
Keywords:inertial confinement fusion  micromanipulators  adhesion  piezoelectric actuators
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