| 真空微电子加速度传感器闭环控制模型仿真与实现 |
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| 引用本文： | 范金焰,温志渝,陈李,温中泉,刘海涛.真空微电子加速度传感器闭环控制模型仿真与实现[J].压电与声光,2012,34(2):222-225. |
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| 作者姓名： | 范金焰 温志渝 陈李 温中泉 刘海涛 |
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| 作者单位： | 重庆大学微纳器件与系统重点学科实验室,重庆400044;重庆大学微系统研究中心,重庆400044;重庆大学微纳系统与新材料技术国家级国际联合研究中心,重庆400044 |
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| 摘 要： | 为提高真空微电子加速度传感器的线性度,提出了基于数字PID控制算法的真空微电子加速度传感器闭环控制方法.建立了真空微电子加速度传感器闭环控制模型,进行仿真分析.设计制作以TMS320VC5416DSP为核心的控制电路,实现了真空微电子加速度传感器的闭环控制.实验结果表明,在士10 m/s2)的测量范围内,加速度计的标度因数为0.212 7,满量程输出电压为0.427 3 V,非线性度≤0.98％.该电路能较好的实现真空微电子加速度传感器的闭环控制.
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| 关 键 词： | 加速度传感器 真空微电子 闭环控制 |
Simulation and Realization of Closed loop Control Model of Vacuum Microelectronic Accelerometer |
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| FAN Jinyan,WEN Zhiyu,CHEN Li,WEN Zhongquan and LIU Haitao.Simulation and Realization of Closed loop Control Model of Vacuum Microelectronic Accelerometer[J].Piezoelectrics & Acoustooptics,2012,34(2):222-225. |
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| Authors: | FAN Jinyan WEN Zhiyu CHEN Li WEN Zhongquan and LIU Haitao |
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| Affiliation: | 1,2,3(1.National Lab.of Novel Micro-nano Devices and System Technology,Chongqing University,Chongqing 400044,China; 2.Microsystem Research Center,Chongqing University,Chongqing 400044,China; 3.International R&D Center of Micro-nano Systems and New Materials Technology,Chongqing University,Chongqing 400044,China) |
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| Abstract: | A closed-loop control method of the vacuum microelectronic accelerometer based on the PID control arithmetic was presented to improve its linearity.The mathematic model of the closed-loop accelerometer was established and simulated.The control circuit was realized and tested based on TMS320VC5416.The test results showed thao the scale factor of accelerometer was 0.212 7,full scale output voltage was 0.427 3 V and non-linearity was less or equal to 0.98%.during the test range of ±10 m/s2).The circuit can realize good closed-loop control of the accelerometer. |
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| Keywords: | accelerometer vacuum microelectronic closed-loop control |
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