| 一种ICP-MS真空测量系统的研制 |
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| 引用本文： | 李明,陈永彦,类成华,杨雷岗. 一种ICP-MS真空测量系统的研制[J]. 真空, 2011, 48(4) |
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| 作者姓名： | 李明 陈永彦 类成华 杨雷岗 |
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| 作者单位： | 钢铁研究总院分析测试所,北京,100081 |
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| 摘 要： | 本文介绍了一种基于C8051F微控制器并应用于电感耦合等离子体质谱仪(ICP-MS)的真空测量系统。系统由真空计组、预处理电路、C8051F微控制器、串行接口和上位机组成,能同时测量接口、透镜和四级杆三个部分的真空状态,且具有较高的集成度,紧凑的体积和较低的功耗,经最后实验证实,系统能准确且稳定的测量各个部分的真空度,可为ICP-MS的正常工作提供相应的条件保障。
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| 关 键 词： | 真空测量 电感耦合等离子体质谱仪 C8051F微控制器 实时测量 |
Development of a vacuum measurement system for ICP-MS |
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| LI Ming,CHEN Yong-yan,LEI Cheng-hua,YANG Lei-gang. Development of a vacuum measurement system for ICP-MS[J]. Vacuum(China), 2011, 48(4) |
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| Authors: | LI Ming CHEN Yong-yan LEI Cheng-hua YANG Lei-gang |
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| Affiliation: | LI Ming,CHEN Yong-yan,LEI Cheng-hua,YANG Lei-gang(Central Iron & Steel Research Institute,Beijing 100081,China) |
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| Abstract: | A vacuum measurement system based on C8051F microcontroller applied to inductively coupled plasma mass spectrometry(ICP-MS) was introduced.The system consists of vacuum gauge group,pre-processing circuit,C8051F microcontroller,serial interface and computer,which can measure the vacuum degree of the interface,lens and quadrupole simultaneously with high integration,compact volume and lower power consumption.By practical test,it proves that this system can measure accurately and stably which provides guarante... |
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| Keywords: | vacuum measurement ICP-MS C8051F microcontroller real-time measurement |
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