| 微型电磁驱动器中微小电磁力的研究 |
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| 引用本文： | 李文军,赵小林,蔡炳初. 微型电磁驱动器中微小电磁力的研究[J]. 微细加工技术, 2002, 0(1): 45-49 |
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| 作者姓名： | 李文军 赵小林 蔡炳初 |
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| 作者单位： | 上海交通大学微米/纳米科学技术研究院,上海,200030 |
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| 摘 要： | 设计了一种应用于微机电系统中的微型电磁驱动器。该微驱动器主要由平面正方形线圈、弹性支撑和坡莫合金薄片构成。采用微细加工技术成功地制作出了这种微驱动器。该驱动器具有较大的驱动力和行程，适用于垂直方向上需求较大偏转的微机电系统中。研究了平面线圈对坡莫合金磁体的微小作用力，并用有限元模拟软件ANSYS，对该作用力进行了模拟分析。
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| 关 键 词： | 微型电磁驱动器 微小电磁力 平面线圈 微机电系统 有限元 |
| 文章编号： | 1003-8213(2002)01-0045-05 |
| 修稿时间： | 2001-07-23 |
Study on Micro-Electromagnetic Force in Electromagnetic Microactuator |
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| LI Wen jun,ZHAO Xiao lin,CAI Bing chu. Study on Micro-Electromagnetic Force in Electromagnetic Microactuator[J]. Microfabrication Technology, 2002, 0(1): 45-49 |
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| Authors: | LI Wen jun ZHAO Xiao lin CAI Bing chu |
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| Abstract: | An electromagnetic microactuator applied in micro electro mechanical systems was designed. The device consists of a square planar coil, a spring support structure, and permalloy magnet film. The microactuator was successfully fabricated by micromachining technology. The main advantage of the microactuator is its capability of providing higher forces over relatively large distance. Micro electromagnetic force between the planar coil and the permalloy magnet film was studied. The micro electromagnetic force was also simulated by finite element software ANSYS. |
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| Keywords: | magnetic microactuator micro magnetic force planar coil MEMS finite element method |
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