| 亚微米聚焦离子束的像散检测与校正技术 |
| |
| 引用本文： | 王学超,汪健如,汪荣军. 亚微米聚焦离子束的像散检测与校正技术[J]. 真空科学与技术学报, 1997, 0(6) |
| |
| 作者姓名： | 王学超 汪健如 汪荣军 |
| |
| 作者单位： | 清华大学电子工程系!北京，100084，清华大学电子工程系!北京，100084，清华大学电子工程系!北京，100084 |
| |
| 摘 要： | 介绍了二级透镜聚焦离子束系统中像散的检测技术与校正技术。详细叙述了像散检测的原理、方法以及像散校正系统的工作原理、电子线路和具体结构。
|
| 关 键 词： | 聚焦离子束 像散 微细加工 |
Astigmation Detection and Correction Technique for Micron Focused Ion Beam |
| |
| Wang Xuechao,Wang Jianru,Wang Rongjun. Astigmation Detection and Correction Technique for Micron Focused Ion Beam[J]. JOurnal of Vacuum Science and Technology, 1997, 0(6) |
| |
| Authors: | Wang Xuechao Wang Jianru Wang Rongjun |
| |
| Abstract: | New techniques of astigmation detection and correction for two-lens focused ion beam (FIB) system were devloped. In addition to the mechanism of astigmatic detection,the astigmator's structure,its related electric circuits and its operating principle were also discussed. |
| |
| Keywords: | Focused ion beam(FIB) Astigmation Microfabrication |
| 本文献已被 CNKI 等数据库收录！ |
