| 玻璃基Pt/Pb(Zr_(0.4)Ti_(0.6))O_3/ITO电容器的结构及物理性能研究 |
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| 引用本文： | 周阳,程春生,赵敬伟,郑红芳,赵庆勋,彭英才,刘保亭.玻璃基Pt/Pb(Zr_(0.4)Ti_(0.6))O_3/ITO电容器的结构及物理性能研究[J].无机材料学报,2010,25(3):242-246. |
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| 作者姓名： | 周阳 程春生 赵敬伟 郑红芳 赵庆勋 彭英才 刘保亭 |
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| 作者单位： | 1. 河北大学 物理科学与技术学院, 保定 071002; 2. 保定学院, 保定 071000; 3. 河北大学 电子信息工程学院, 保定 071002 |
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| 基金项目： | 国家973前期专项(2007CB616910); 国家自然科学基金(60876055); 河北省自然科学基金(E2008000620,E2009000207); 教育部基金(207013); 河北省应用基础研究计划重点基础研究(08965124D) |
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| 摘 要： | 采用溶胶-凝胶方法在玻璃基ITO电极上制备了Pt/Pb(Zr0.4Ti0.6)O3(PZT)/ITO电容器.采用X射线衍射仪、铁电测试仪、分光光度计对其微观结构、电学性能及光学性能进行了测量.结果表明PZT薄膜结晶良好,具有(101)高度择优取向.铁电电容器具有良好的保持特性和抗疲劳特性,具有较大的剩余极化强度和电阻率,5V电压下的剩余极化强度和电阻率分别为41.7μC/cm2和2.5×109Ω.cm;漏电流测量结果表明电压小于0.8V时为欧姆导电机制,当电压大于0.8V时,漏电流满足肖特基发射机制.光学透射谱结果表明在短波范围内,PZT表现出强吸收作用;在长波范围内,PZT表现为强透射,最大透射率达到95%.
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| 关 键 词： | Pt/PZT/ITO 溶胶凝胶法 电学性能 |
| 收稿时间： | 2009-07-14 |
| 修稿时间： | 2009-10-15 |
Investigation of Structural and Physical Properties of Pt/Pb(Zr_(0.4)Ti_(0.6))O_3/ITO Capacitors Fabricated on Glass Substrate |
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| ZHOU Yang,CHENG Chun-Sheng,ZHAO Jing-Wei,ZHENG Hong-Fang,ZHAO Qing-Xun,PENG Ying-Cai,LIU Bao-Ting.Investigation of Structural and Physical Properties of Pt/Pb(Zr_(0.4)Ti_(0.6))O_3/ITO Capacitors Fabricated on Glass Substrate[J].Journal of Inorganic Materials,2010,25(3):242-246. |
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| Authors: | ZHOU Yang CHENG Chun-Sheng ZHAO Jing-Wei ZHENG Hong-Fang ZHAO Qing-Xun PENG Ying-Cai LIU Bao-Ting |
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| Affiliation: | 1. College of Physics Science and Technology,Hebei University, Baoding 071002, China; 2. Baoding University, Baoding 071000, China; 3. College of Electronic and Information Engineering, Hebei University, Baoding 071002, China |
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| Abstract: | Pt/Pb(Zr0.4Ti0.6)O3(PZT)/ITO capacitors were fabricated on glass substrate,where PZT film was prepared by sol-gel method.The structural and physical properties of Pt/PZT/ITO capacitors were investigated.The microstructural,electrical and optical properties of Pt/PZT/ITO capacitors were characterized by X-ray diffraction(XRD),ferroelectric tester,UV-spectrophotometer,respectively.It is found that PZT is highly(101) oriented and well crystallized.Ferroelectric measurements indicate that Pt/PZT/ITO capacitor,m... |
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| Keywords: | Pt/PZT/ITO sol-gel method electric property |
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