| 在多晶银基片上制备YBCO织构膜的研究 |
| |
| 引用本文： | 孙灼,翟乐恒.在多晶银基片上制备YBCO织构膜的研究[J].北京工业大学学报,1996,22(2):72-75. |
| |
| 作者姓名： | 孙灼 翟乐恒 |
| |
| 作者单位： | 北京工业大学金属材料学与工程学系 |
| |
| 摘 要： | 采用ＹＢＣＯ烧结靶平面磁控溅射，原位处理工艺，在多晶银基片上进行镀制高温超导薄膜的研究。经过大量实验，研究了沉积温度、真空度、氩氧比对膜层结构、性能的影响。并在温度为７００℃、真空度为１８Ｐａ、氩氧比为１：１，靶电流为１～２Ａ的条件下，获得了具有ｃ轴织构的ＹＢＣＯ超导薄膜。
|
| 关 键 词： | 磁控溅射，多晶基片，C轴织构，YBCO超导膜 |
A Study On The Preparation of YBCO Textured Thin Films On Polycrystalline Silver Substrates |
| |
| Sun Suo,Zhai Leheng,Xu Xinfu,Zhou Meiling,Suo Hongli.A Study On The Preparation of YBCO Textured Thin Films On Polycrystalline Silver Substrates[J].Journal of Beijing Polytechnic University,1996,22(2):72-75. |
| |
| Authors: | Sun Suo Zhai Leheng Xu Xinfu Zhou Meiling Suo Hongli |
| |
| Abstract: | In This paper,the plating of high temperature superconductive thin films is studied. The superconductive thin films are plated through magnetron sputtering with a plane YBCO Sintering target and treated in-situ annealed on polycrystalline silver substrates.The effects of deposit temperature, vacuum degree and the ratio of argon to oxygen on stracture and property of films are stulied. The textured thin films of YBCO superconductor are obtained under the following condition:substrate temperature 700℃,vacuum 18Pa,the ratio of Ar to O2 is 1:1. |
| |
| Keywords: | magnetron sputter polycrystalline substrates C exile texture YBCO superconductive thin films |
| 本文献已被 CNKI 维普 等数据库收录！ |
