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Laterally Ordered Sub‐10 nm Features Obtained From Directed Self‐Assembly of Si‐Containing Block Copolymer Thin Films |
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| Authors: | Yecheol Rho Karim Aissou Muhammad Mumtaz Wonsang Kwon Gilles Pécastaings Cristian Mocuta Stefan Stanecu Eric Cloutet Cyril Brochon Guillaume Fleury Georges Hadziioannou |
| Affiliation: | 1. Laboratoire de Chimie des Polymères Organiques, CNRS–ENSCPB–Université de Bordeaux, Pessac CEDEX, France;2. ARKEMA, Groupement de Recherches de Lacq, Lacq CEDEX, France;3. Synchrotron SOLEIL, Gif‐sur‐Yvette CEDEX, France |
| Abstract: | |
| Keywords: | block copolymers directed self‐assembly lateral order moiré patterns sinusoidal templates |