| 空间微机电系统的研究与进展 |
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| 引用本文： | 黄良甫,贾付云. 空间微机电系统的研究与进展[J]. 真空与低温, 2002, 8(4): 187-196 |
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| 作者姓名： | 黄良甫 贾付云 |
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| 作者单位： | 兰州物理研究所,甘肃,兰州,730000 |
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| 摘 要： | 介绍了微机电系统的基本原理及其在空间应用的发展概况,着重介绍了空间微传感器、微执行器、RF-MEMS、MOEMS、微仪器和微/纳卫星的研究与进展情况。
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| 关 键 词： | 微机电系统 微卫星 空间应用 |
| 文章编号： | 1006-7086(2002)04-0187-10 |
| 修稿时间： | 2002-08-02 |
RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS |
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| HUANG Liang|fu,JIA Fu|yun. RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS[J]. Vacuum and Cryogenics, 2002, 8(4): 187-196 |
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| Authors: | HUANG Liang|fu JIA Fu|yun |
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| Abstract: | The basal principles and space applictions of Micro Mechanical Systems are introduced. The detailed status in the research and development of micro sensors, micro actuators, RF|MEMS, MOSEMS, micro devices and micro/nano satellites are presented.; |
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| Keywords: | Micro Electro Mechanical Systems microsats space application |
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