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非接触压电马达驱动机理分析
引用本文:刘景全 杨斌 周广华 蔡炳初 杨志刚. 非接触压电马达驱动机理分析[J]. 压电与声光, 2005, 27(5): 562-565
作者姓名:刘景全 杨斌 周广华 蔡炳初 杨志刚
作者单位:[1]上海交通大学微纳米科学技术研究院、薄膜与微细技术教育部重点实验室、微米/纳米加工技术国家级重点实验室,上海200030 [2]吉林大学机械科学与工程学院,吉林长春130025
基金项目:国家自然科学基金资助项目(50205017)
摘    要:主要研究行波型非接触压电马达的驱动机理,该文引入边界层概念,对振动体产生的边界层进行分析,探讨行波型超声波非接触驱动机理。给出在振于产生的边界层内超声波非接触驱动主要为声流驱动,而在边界层外是由壁面行波产生的斜向声辐射压力驱动。

关 键 词:压电马达 非接触 驱动机理
文章编号:1004-2474(2005)05-0562-04
收稿时间:2003-12-23
修稿时间:2003-12-23

Driving Mechanism Analysis of Non-contact Ultrasonic Motor
LIU Jing-quan ,YANG Bin ,Zhou Guang-hua ,CAI Bing-chu ,YANG Zhi-gang(. Key Lab. for Thin Film and Microfabrication Technology of Ministry of Education, National Key Lab. of Micro/Nanofabrication Technology, Research Institute of Mico/Nanometer Science. Driving Mechanism Analysis of Non-contact Ultrasonic Motor[J]. Piezoelectrics & Acoustooptics, 2005, 27(5): 562-565
Authors:LIU Jing-quan   YANG Bin   Zhou Guang-hua   CAI Bing-chu   YANG Zhi-gang(. Key Lab. for Thin Film  Microfabrication Technology of Ministry of Education   National Key Lab. of Micro/Nanofabrication Technology   Research Institute of Mico/Nanometer Science
Affiliation:LIU Jing-quan ,YANG Bin ,Zhou Guang-hua ,CAI Bing-chu ,YANG Zhi-gang(1. Key Lab. for Thin Film and Microfabrication Technology of Ministry of Education, National Key Lab. of Micro/Nanofabrication Technology, Research Institute of Mico/Nanometer Science
Abstract:In this paper,the driving mechanism of non-contact ultrasonic driving based on traveling wave is analyzed systematically.Based on the theory of the boundary layer,the author obtains the following results: inside of the boundary layer of vibrator,the driving force of the non-contact ultrasonic driving is provided by the acoustic streaming;while outside of the boundary layer,the slider is driven by the acoustic radiation pressure which provides the oblique pressure force.
Keywords:piezoelectric motor    non-contact    driving mechanism
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