| 聚酰亚胺悬臂MOEMS电磁光开关的优化设计 |
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| 引用本文： | 孔庆峰,梁静秋,钟砚超,侯凤杰,李佳,孙德贵. 聚酰亚胺悬臂MOEMS电磁光开关的优化设计[J]. 传感技术学报, 2006, 19(5): 1735-1738 |
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| 作者姓名： | 孔庆峰 梁静秋 钟砚超 侯凤杰 李佳 孙德贵 |
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| 作者单位： | 1. 应用光学国家重点实验室,中国科学院长春光学精密机械与物理研究所,吉林,长春,130031;中国科学院研究生院,北京,100039
2. 应用光学国家重点实验室,中国科学院长春光学精密机械与物理研究所,吉林,长春,130031 |
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| 基金项目： | 国家自然科学基金，中国科学院"优秀博士学位论文、院长奖获得者科研启动专项资金"资助项目 |
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| 摘 要： | 利用聚酰亚胺(PI)优良的机械、绝缘、耐热等性能,设计出基于PI膜的磁控光开关.给出合理的线圈宽度与间隙宽度,提出了八边形的线圈绕组结构,计算得出PI膜悬臂梁光开关驱动电压与工作距离的关系,并对悬臂梁长度、宽度、厚度进行优化.在驱动电压为2V时,自由端位移达到2mm.
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| 关 键 词： | 光开关 电磁驱动 悬臂梁 聚酰亚胺 |
| 文章编号： | 1004-1699(2006)05-1735-04 |
| 修稿时间： | 2006-07-01 |
Optimized Design for a PI-Cantilever Electromagnetic Actuation MOEMS Optical Switch |
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| Kong QingFeng,Liang JingQiu,Zhong YanChao,Hou FengJie,Li Ji,Sun DeGui. Optimized Design for a PI-Cantilever Electromagnetic Actuation MOEMS Optical Switch[J]. Journal of Transduction Technology, 2006, 19(5): 1735-1738 |
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| Authors: | Kong QingFeng Liang JingQiu Zhong YanChao Hou FengJie Li Ji Sun DeGui |
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| Affiliation: | 1.State Key Laboratory of Applied Optics,changchun institute of optics,fine mechanics and physics,chinese academy of sciences,changchun 130031,china 2.graduate school of chinese academy of science,beijing 100039,china |
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| Abstract: | A kind of electromagnetic actuation optical switch is designed based on the high performance of polyimide (PI) in mechanical character, insulation and heat-resistant . We analyzed the winding configuration and chose the regular octagon form and also studied the relationship between the driving voltage and working distance about the PI-cantilever, which aimed at optimizing the structure of the PI-cantilever in length, width and thickness. At a driving voltage of 2V, the movable part got a displacement of 2 mm. |
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| Keywords: | optical switch electromagnetic actuation cantilever polyimide |
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