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Novel piezoelectric-driven XYθ wafer table for an electron beam image projector |
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| Authors: | K. Sugihara I. Mori T. Tojo C. Ito M. Goto M. Tabata T. Shinozaki |
| Affiliation: | 1. Basic Research Department, VLSI Research Center, Toshiba Corporation, 1, Komukai, Toshiba-cho, Saiwai-ku, Kawasaki, 210, Japan |
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