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Impact of Ge-Sb-Te compound engineering on the set operation performance in phase-change memories
Authors:Mattia Boniardi  Daniele IelminiInnocenzo Tortorelli  Andrea RedaelliAgostino Pirovano  Mario AllegraMichele Magistretti  Camillo BresolinDavide Erbetta  Alberto ModelliEnrico Varesi  Fabio PellizzerAndrea L. Lacaita  Roberto Bez
Affiliation:a Dipartimento di Elettronica ed Informazione and IU.NET, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy
b Istituto di Fotonica e Nanotecnologie-Consiglio Nazionale delle Ricerche (IFN-CNR), Sez. Politecnico di Milano, 20133 Milano, Italy
c Micron, Process R & D, Agrate Brianza, Italy
Abstract:The phase-change memory (PCM) technology is considered as one of the most attractive non-volatile memory concepts for next generation data storage. It relies on the ability of a chalcogenide material belonging to the Ge-Sb-Te compound system to reversibly change its phase between two stable states, namely the poly-crystalline low-resistive state and the amorphous high-resistive state, allowing the storage of the logical bit. A careful study of the phase-change material properties in terms of the set operation performance, the program window and the electrical switching parameters as a function of composition is very attractive in order to enlarge the possible PCM application spectrum. Concerning the set performance, a crystallization kinetics based interpretation of the observed behavior measured on different Ge-Sb-Te compounds is provided, allowing a physics-based comprehension of the reset-to-set transition.
Keywords:Phase-change memory (PCM)   Ge-Sb-Te ternary diagram   Chalcogenide material   Composition engineering   Set time performance   Crystallization kinetics
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