| 氟硅酸盐制取四氟化硅的研究进展 |
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| 引用本文： | 蔡苗,唐安江,王乐深,何元琴,何磊. 氟硅酸盐制取四氟化硅的研究进展[J]. 硅酸盐通报, 2017, 36(3): 859-863 |
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| 作者姓名： | 蔡苗 唐安江 王乐深 何元琴 何磊 |
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| 作者单位： | 贵州大学化学与化工学院,贵阳,550025;贵州理工学院化学工程学院,贵阳,550003 |
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| 摘 要： | SiF4多被应用于电子行业和半导体行业,氟硅酸盐制备SiF4是制备方法中的一种.本文介绍了氟硅酸盐的性质,制备方法,以及氟硅酸盐制备SiF4的方法,并对部分氟硅酸盐制备SiF4的条件及产物进行了对比.
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| 关 键 词： | 四氟化硅 氟硅酸盐 分解 工艺, |
Research Progress on Preparation of Silicon Tetrafluoride from Fluorosilicate |
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| CAI Miao,TANG An-jiang,WANG Le-shen,HE Yuan-qin,HE Lei. Research Progress on Preparation of Silicon Tetrafluoride from Fluorosilicate[J]. Bulletin of the Chinese Ceramic Society, 2017, 36(3): 859-863 |
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| Authors: | CAI Miao TANG An-jiang WANG Le-shen HE Yuan-qin HE Lei |
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| Abstract: | SiF4 is widely used in the electronics industry and the semiconductor industry, preparation of SiF4 by fluorosilicate is a kind of preparation method.In this paper, the properties and preparation methods of fluorosilicate are introduced.The method of preparing SiF4 by fluorosilicate is introduced.The conditions and products of SiF4 prepared by fluorosilicate were compared. |
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| Keywords: | silicon tetrafluoride fluorosilicate dissociation technology, |
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