| Nb2O5掺杂ZnO超高致密度陶瓷靶材的制备 |
| |
| 引用本文： | 王晨,董磊,尚福亮,高玲,杨海涛.Nb2O5掺杂ZnO超高致密度陶瓷靶材的制备[J].硅酸盐通报,2017,36(9):3150-3154. |
| |
| 作者姓名： | 王晨 董磊 尚福亮 高玲 杨海涛 |
| |
| 作者单位： | 深圳大学材料学院,深圳,518060 |
| |
| 基金项目： | 深圳市基础研究项目(JCYJ20160422144751573,JCYJ20160422104921235,JCYJ20140418181958489) |
| |
| 摘 要： | 采用传统的固相烧结技术制备了Nb2 O5掺杂ZnO陶瓷靶材,研究了不同烧结温度、Nb2 O5掺杂量对NZO靶材的电学性能、相对密度、抗弯强度的影响.结果表明:当烧结温度1200℃,Nb2 O5的掺杂量为0.4wt%时,其综合性能最佳,此时靶材电阻率为0.189Ω·cm,相对密度为99.46%,抗弯强度141.74 MPa.
|
| 关 键 词： | 陶瓷靶材 烧结 掺杂 ZnO |
Preparation of Nb2 O5-doped ZnO Ultrahigh Density Ceramic Targets |
| |
| WANG Chen,DONG Lei,SHANG Fu-liang,GAO Ling,YANG Hai-tao.Preparation of Nb2 O5-doped ZnO Ultrahigh Density Ceramic Targets[J].Bulletin of the Chinese Ceramic Society,2017,36(9):3150-3154. |
| |
| Authors: | WANG Chen DONG Lei SHANG Fu-liang GAO Ling YANG Hai-tao |
| |
| Abstract: | Nb2 O5-doped ZnO targets were prepared by traditional solid-state sintering method .The effects of the different sintering temperatures and Nb 2 O5-doped amount on the electrical properties , the relative density as well as the bending resistance of the sintered target were studied .The results show that the target can reach the best comprehensive properties including a resistivity of 0.189 Ω· cm, a relative density of 99 .46%and a bending strength of 141 .74 MPa when the sintering temperature is 1200 ℃and Nb2 O5 doping amount is 0.4wt%. |
| |
| Keywords: | ceramic target sintering doping ZnO |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《硅酸盐通报》浏览原始摘要信息 |
|
点击此处可从《硅酸盐通报》下载全文 |
|
