| Abstract: | New aspects regarding sputter‐depositing dense coatings, in particular a solid lubricant of practical interest Using MoS2‐based solid lubricant films as an example, this paper focuses on approaches to preventing sputter‐deposited films from attaining columnar microstructures. This is how it becomes possible to deposit tribological coatings that are characterised by a high durability. As a result of scanning electron microscopy on microstructures, texture measurements by means of XRD, and surface analysis, focusing on sputter‐deposited MoS2 films, a concept of how to develop thick and dense MoS2‐based solid lubricant films was generated. At an early stage of film growth a dense and flawless microstructure forms. In order to make the favourable properties of these underlayers available for tribological applications, metallic intralayers were introduced, by means of which the MoS2 film growth was to be repeatedly interrupted. |
