| 半导体激光端点测长干涉仪实验系统 |
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| 引用本文： | 侯德胜 周明宝. 半导体激光端点测长干涉仪实验系统[J]. 光电工程, 1999, 26(2): 5-8 |
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| 作者姓名： | 侯德胜 周明宝 |
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| 作者单位： | 中国科学院光电技术研究所微细加工光学技术国家重点实验室 |
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| 基金项目： | 中国科学院光电技术研究所所长基金,微细加工光学技术国家重点实验室基金 |
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| 摘 要： | 半导体激光端点干涉测长法是利用半导体激光频率调制特性的一种在长度的两个端点干涉测量长度的新方法。本文介绍基于这种测长方法研制的半导体激光端点测长干涉仪实验的基本原理，构成，定标方法和测量结果。
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| 关 键 词： | 激光干涉仪 半导体激光器 长度测量 频率调制 |
An Experimental Interferometer System for the Length Measurement at Endpoints with Laser Diode |
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| HOU De sheng,ZHOU Ming bao,DU Chun lei YANG Dai ming,DENG Qi ling. An Experimental Interferometer System for the Length Measurement at Endpoints with Laser Diode[J]. Opto-Electronic Engineering, 1999, 26(2): 5-8 |
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| Authors: | HOU De sheng ZHOU Ming bao DU Chun lei YANG Dai ming DENG Qi ling |
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| Abstract: | The endpoint interferometric length measurement with laser diode is a new length measurement method by using the frequency modulation characteristics of a laser diode and the interferometric measurement is carried out at two endpoints of the measured length.The basic principle,constitution,scaling method and measuring results of the experimental endpoint length measurement interferometer system with laser diode developed based on this method are introduced in the paper. |
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| Keywords: | Laser interferometers Semiconductor lasers Length measurement Frequency modulation. |
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