IZO deposition by RF and DC sputtering on paper and application on flexible electrochromic devices |
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| Authors: | Lúcia Gomes Ana Marques Aida Branco Jorge Araújo Mário Simões Susana Cardoso Fernando Silva Inês Henriques César A.T. Laia Cláudia Costa |
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| Affiliation: | 1. YDreams, Madan Parque – Sul, 2825-149 Caparica, Portugal;2. Requimte, Departamento de Química, Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa, 2829-516 Caparica, Portugal;3. Ynvisible, Rua Mouzinho de Albuquerque 7, 2070-104 Cartaxo, Portugal;4. INESC-Microsistemas e Nanotecnologias (INESC-MN) and Instituto de Nanociência e Nanotechnologia (IN), Rua Alves Redol 9, 1000-029 Lisbon, Portugal |
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| Abstract: | The present work describes indium-zinc oxide (IZO) sputtering depositions onto several types of papers, using radio-frequency (RF) and direct current (DC) sputtering with a ceramic IZO target. The electrical and optical properties of the resulting materials were optimized; by studying the argon and oxygen gas flow rates and the sputtering power effects. At optimal deposition conditions, thin films of IZO were achieved with a low sheet resistance (about 20 Ω/sq) and an optical transmittance of ca. 80% in the visible spectrum range. These materials retained these properties for more than 8 months. Electrochromic devices (ECDs) with several configurations were built with those conductive papers and life cycling and contrast were measured for the ECDs. These devices exhibited a very good color contrast (as defined using L*a*b* color coordinates, = 32) and electrochromic cyclability up to 30,000 redox cycles. |
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| Keywords: | RF sputtering DC sputtering Paper IZO Screen-printing PEDOT:PSS |
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