光纤探针式轮廓仪的理论与实验研究

在单根单模光纤作为发射光纤兼接收光纤的情况下,提出了光纤探针式轮廓仪,得到一个光纤探针来测量被测表面的微观轮廓曲线,并由轮廓曲线得到了表面粗糙度的各种参数和光纤探针的形状和尺寸。同时阐述了利用光纤探针测量表面轮廓和粗糙度的原理及光纤探针式轮廓仪的构成和工作原理,给出了测量结果。

Theory and Experiment of Optical Fiber Probe Profilemeter

In order to form an optical fiber probe, the optical fiber probe profilemeter uses a singular single_mode optical fiber as the detector for transmitting and receiving light. This optical fiber probe can be used to measure the profiles and roughness of the measured surface were. In this paper, the shape and size are calculated and analyzed, the principles of measuring profile and roughness of the measured surface discussed, the construction and operating principle of the optical fiber probe profilemeter detailed. In the end, the measurement results are presented.