| (Ti,Al)N薄膜的升温出气特性研究 |
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| 引用本文： | 马乾廷,谢子燕,庞世瑾.(Ti,Al)N薄膜的升温出气特性研究[J].真空科学与技术学报,1993(5). |
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| 作者姓名： | 马乾廷 谢子燕 庞世瑾 |
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| 作者单位： | 中科院北京真空物理开放实验室，中科院北京真空物理开放实验室，中科院北京真空物理开放实验室 北京 100080，北京 100080，北京 100080 |
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| 摘 要： | 介绍了采用多弧离子镀方法在不锈钢表面镀覆(Ti,Al)N薄膜,并对膜的结构、表面成分和形貌进行了简单分析,用热出气方法研究其出气特性,并与不锈钢的热出气性能进行比较,发现在不锈钢表面镀覆一层(Ti,Al)N膜可以有效地阻挡不锈钢体内氢扩散和碳偏析,因此(Ti,Al)N是比较理想的真空材料。
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| 关 键 词： | 不锈钢 (Ti Al)N 热出气 |
A STUDY ON THERMAL OUTGASSING CHARACTERISTICS OF (Ti, AI)N FILM |
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| Ma Qianting,Xie Ziyan,Pang Shijing.A STUDY ON THERMAL OUTGASSING CHARACTERISTICS OF (Ti, AI)N FILM[J].JOurnal of Vacuum Science and Technology,1993(5). |
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| Authors: | Ma Qianting Xie Ziyan Pang Shijing |
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| Abstract: | In this paper, a simple analysis of the structure, components and surface topograghy of (Ti, AI)Ncoated stainless steel by arc cathode apparatus was made, then the vacuum characteristics of (Ti, Al)N was discussed using thermal outgassing method. We have proved that (Ti, Ai)N can effectively prevent hydrogen diffusion and carbon segregation from the bulk of stainless steel. We conclude that (Ti, Al)N is a better vacuum material. |
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| Keywords: | Stainless steel (Ti Al)N Thermal outgassing |
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