Pd基光学氢敏感薄膜材料的研究进展

Pd基光学氢敏感薄膜材料是光学氢敏感薄膜材料最为重要的一类，主要包括Pd，Pd／Ni合金，Pd／WO3，Pd／MoO3，Pd／TiOx，Pd／MoS2等薄膜材料。本文从这类薄膜材料的制备、性能及应用方面，对Pd基光学氢敏感薄膜材料的研究进展作了详细的论述。目前Pd基光学氢敏感薄膜材料的制备主要还是应用溅射法。在所有钯基氢敏感材料中以Pd膜的性能最佳，但是由于在应用过程中存在Pd膜出现表面起泡、层错和钯膜与载体结合能力下降等缺陷，因此Pd／Ni合金，Pd／WO3，Pd／MoO3，Pd／TiOx，Pd／MoS2等薄膜材料相继被开发。但目前上述薄膜材料在研究和应用中仍然存在许多问题，本文在论述中分别提出了上述材料目前研究中存在的问题以及今后的发展方向。

Progress in Study of Optical Hydrogen Film Materials Based on Palladium

Optical hydrogen film materials based on palladium are the most important species of optical hydrogen film materials. They include Pd, Pd/Ni alloy, Pd/WO3, Pd/MoO3, Pd/TiOx and Pd/MoS2 films. This paper outlines the progress in research on optical hydrogen materials based on palladium from preparation, performance to application of these film materials. At present, the preparation of optical hydrogen film materials based on palladium is mainly using sputtering method. The performance of Pd film is the best in all optical hydrogen film materials based on palladium. However, there are some disadvantages such as foaming of Pd film surface, lamination fault sheet and decreasing of cohesion between Pd film and carrier in applications. Thereby, Pd/Ni alloy, Pd/WO3, Pd/MoO3, Pd/TiOx and Pd/MoS2 films are exploited one after another. But there are some problems in researches and applications of these film materials above-mentioned. The problems and direction in study on the materials based on palladium are put forward in discussions of the paper.