| ITO防电磁辐射玻璃屏蔽性能研究 |
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| 引用本文： | 李建涛,许晓丽,赵雅丽. ITO防电磁辐射玻璃屏蔽性能研究[J]. 中国材料科技与设备, 2008, 5(6): 46-47 |
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| 作者姓名： | 李建涛 许晓丽 赵雅丽 |
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| 作者单位： | [1]太原科技大学材料科学与工程学院,山西太原030024 [2]中国电子科技集团公司第三十三研究所,山西太原030006 |
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| 摘 要： | 采用直流磁控溅射技术在玻璃基板上沉积ITO薄膜，通过调整基板温度、薄膜厚度得到了最低方阻1．4Ω／□，薄膜透光率超过76％。对样品在150KHz到18GHz频段内电磁屏蔽效能采用屏蔽室法进行测试，1G频率点得到的屏蔽效能最好，达到了54dB，在屏蔽困难的低频段，150KHz频率点的屏蔽效能迟到24dB。
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| 关 键 词： | ITO薄膜 磁控溅射 电磁屏蔽 屏蔽效能 |
Electromagnetic Shielding Properties of ITO Coated Glass |
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| Affiliation: | LI Jian-tao, XU Xiao-li, Zhao Ya-li(1. Materials Science ＆ Engineering Department, Taiyuan University of Science and Technology, Shanxi, Taiyuan, 030024, China ; 2. CETC No. 33 Research Institute, Shanxi,Taiyuan,030006 ,China) |
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| Abstract: | ITO films were prepared by DC magnetron sputtering on glass substrate. By adjusting the substrate temperature.film thickness,minimum sheet resistance 1.4Ω/□ was obtained, while transmittance beyond 76%. Using shielding room method, electromagnetic shielding effectiveness（SE）of the Samples were tested in 150 KHz to 18 GHz frequency bands. Best SE 54 dB was obtained at 1G frequency; in low frequency band, though electromagnetic was difficult to shield, SE at 150 KHz frequency reached 24 dB. |
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| Keywords: | ITO thin film Magnetron sputtering Electromagnetic shielding Shielding effectiveness |
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