圆盘型非接触超声波马达定子的振动模拟与测试

介绍一种圆盘型非接触超声波马达的结构。利用有限元法计算了超声波马达定子在不同振动模态下的固有频率，并用激光测振仪对定子进行了测试，结果两者吻合较好。由于振幅和非接触马达的声辐射压力密切相关，因此通过谐响应分析计算了定子的振幅与定子驱动电压的关系，从而为马达的实验研究提供了理论依据。在最优模态B21下进行转子转速测试，测得最高转速为1600rpm。

Vibration simulation and test of the stator of non-contact ultrasonic motor

The configuration of the disc-type non-contact ultrasonic motor is given in this paper. The natural frequency and corresponding vibration mode are calculated and analyzed by finite element method. To verify the effectiveness of finite element model,measurements by a laser doppler vibrometer are made and good agreement between simulational and experimental results is shown. Because vibrational amplitude is tightly correlated with the acoustic radiation pressure of the non-contact motor, the relationship between the vibrational amplitude and applied voltage of the stator is discussed by harmonic analysis.The results show that the vibrational amplitude increases proportional to the applied voltage which served as the theoretical base for the motor's design and optimization. The revolution speed measured under the optimal B_(21) vibration mode is 1600 rpm.