| 溶胶-凝胶旋涂法制备ITO薄膜 |
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| 引用本文： | 陈健,张江,高善民,曲荣君.溶胶-凝胶旋涂法制备ITO薄膜[J].微纳电子技术,2007,44(3):132-136. |
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| 作者姓名： | 陈健 张江 高善民 曲荣君 |
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| 作者单位： | 鲁东大学,化学与材料科学学院,山东,烟台,264025 |
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| 基金项目： | 中国博士后科学基金;山东省自然科学基金;鲁东大学校科研和教改项目 |
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| 摘 要： | 以InCl_3和SnCl_4·5H_2O为主要原料,采用溶胶-凝胶法和旋转涂膜工艺,在普通玻璃基片上制备掺锡氧化铟(ITO)纳米透明导电薄膜。应用X射线衍射(XRD)、扫描电子显微镜(SEM)对薄膜进行表征;研究了不同热处理温度、热处理时间及不同旋转速度对薄膜形态和结构的影响。结果表明,采用溶胶-凝胶旋涂法制备的ITO薄膜是由立方相纳米颗粒构成,随涂层增加,薄膜表面变得平滑。随热处理温度的提高或时间的延长,薄膜由非晶态逐渐转化为良好的晶态薄膜。
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| 关 键 词： | ITO薄膜 溶胶-凝胶法 制备 表征 |
| 文章编号： | 1671-4776(2007)03-0132-05 |
| 修稿时间： | 2006-09-27 |
ITO Thin Films Prepared by the Sol-Gel Spin-Coating Method |
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| CHEN Jian,ZHANG Jiang,GAO Shan-min,QU Rong-jun.ITO Thin Films Prepared by the Sol-Gel Spin-Coating Method[J].Micronanoelectronic Technology,2007,44(3):132-136. |
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| Authors: | CHEN Jian ZHANG Jiang GAO Shan-min QU Rong-jun |
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| Affiliation: | School of Chemistry and Materials Science, Ludong University, Yantai 264025, China |
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| Abstract: | Using InCl_3 and SnCl_4·5H_2O as raw materials,Indium tin oxide thin films were prepared by the sol-gel spin-coating process. The phase composition and morphology properties of ITO thin films were characterized by the techniques of X-ray diffraction(XRD)and scanning electron microscope(SEM). The influence of the heat treated temperature,time and spin speed for the films structure and morphologies were studied. The results show that the ITO thin films are composite by cubic phase nanoparticles. Along with the coating numbers increase,the face became smoothness. The films gradate from noncrystalline to crystalline along with the increase of heat treatment temperature and time. |
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| Keywords: | ITO thin films sol-gel process preparation characterization |
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