Affiliation: | aSchool of Mechanical Engineering, Kyungpook National University, Sankyukdong 1370, Bukgu, Daegu 702-701, Republic of Korea bDepartment of Sensor Engineering, Kyungpook National University, Daegu 702-701, Republic of Korea cMEMS Lab., Materials and Devices Research Center, Samsung Advanced Institute of Technology, Suwon 449-712, Republic of Korea |