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湿敏半导体陶瓷阻–湿特性的研究
引用本文:单丹,曲远方. 湿敏半导体陶瓷阻–湿特性的研究[J]. 电子元件与材料, 2005, 24(1): 7-9
作者姓名:单丹  曲远方
作者单位:天津大学先进陶瓷与加工技术教育部重点实验室,天津,300072
摘    要:定量分析了多孔半导体陶瓷低湿度范围内的湿敏机理,通过理论推导,得出电阻与相对湿度关系的解析表达式。湿度较低时,半导体陶瓷中起主要作用的是电子电导。假定吸附表面态由吸附氧离子构成,表面态吸附水分子后,向体内发射电子,用统计理论对这一过程进行推演,得出了阻–湿关系表达式。结果表明:在低湿度区(x<10%),表达式与文献提供的TiO2材料的实验数据吻合良好。

关 键 词:电子技术  多孔半导体陶瓷  相对湿度  表面吸附
文章编号:1001-2028(2005)01-0007-03
修稿时间:2004-07-02

Study on Resistance-humidity Characteristics of Humid-sensing Semiconductor Ceramic
SHAN Dan,QU Yuan-fang. Study on Resistance-humidity Characteristics of Humid-sensing Semiconductor Ceramic[J]. Electronic Components & Materials, 2005, 24(1): 7-9
Authors:SHAN Dan  QU Yuan-fang
Abstract:Analyzed was the humid-sensing mechanism of porous semiconductor ceramic in low humidity range. And the relationship equation between resistance and relative humidity was also obtained. When relative humidity was below 10%, the electron conductance plays primary role in semiconductor ceramic. The adsorbing surface layer consists of O?2 . After the layers adsorb water molecule, it launches electrons into the body. The process is explained by statistic theory, and above-mentioned equation coincides with data provided in reference [9].
Keywords:electronic technology  porous semiconductor ceramic  relative humidity  surface absorption
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