| 恒压式气体微流量计测控系统的设计 |
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| 引用本文： | 冯焱,成永军,赵定众,张涤新,李得天. 恒压式气体微流量计测控系统的设计[J]. 真空, 2004, 41(2): 37-40 |
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| 作者姓名： | 冯焱 成永军 赵定众 张涤新 李得天 |
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| 作者单位： | 兰州物理研究所,甘肃,兰州,730000 |
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| 摘 要： | 介绍了恒压式气体微流量计的测量原理及其测控系统的设计方案,对压力测量、变容室气体温度测量、变容室体积变化率测量、恒压控制等关键技术进行了详细说明。该测控系统的应用可以使气体微流量计的测量范围和不确定度均优于设计指标。
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| 关 键 词： | 气体微流量计 测量与控制 计算机应用 |
| 文章编号： | 1002-0322(2004)02-0037-04 |
Design of measurement control system of constant pressure gas micro-flowmeter |
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| FENG Yan,CHENG Yong-jun,ZHAO Ding-zhong,ZHANG Di-xin,LI De-tian. Design of measurement control system of constant pressure gas micro-flowmeter[J]. Vacuum(China), 2004, 41(2): 37-40 |
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| Authors: | FENG Yan CHENG Yong-jun ZHAO Ding-zhong ZHANG Di-xin LI De-tian |
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| Abstract: | The measurement principle and design scheme of a measurement/control system for constant-pressure gas micro-flowmeter are introduced. The key techniques, including the measurements of pressure, gas temperature and volume changing rates in variable volume chamber and constant pressure control, are presented in detail. Using this measurement/control system, the measurement range and uncertainty of constant-pressure gas micro-flowmeter show better than design target. |
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| Keywords: | gas micro-flowmeter measurement/control computer application |
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