| Design of a Silicon Beam Resonator for a Novel Gas Sensor |
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| 作者姓名： | Hao Yilong Xu Jiaji Zhang Guobing Wu Guoying Yan Guizhen |
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| 作者单位： | 北京大学微电子研究院 微米/纳米加工技术国家重点实验室，北京 100871;北京大学微电子研究院 微米/纳米加工技术国家重点实验室，北京 100871;北京大学微电子研究院 微米/纳米加工技术国家重点实验室，北京 100871;北京大学微电子研究院 微米/纳米加工技术国家重点实验室，北京 100871;北京大学微电子研究院 微米/纳米加工技术国家重点实验室，北京 100871 |
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| 摘 要： | 研究了一种基于硅悬臂梁谐振器的新型气体传感器.该传感器在敏感环境中,可同时获得敏感膜电导率和质量变化,测量被测气体分子的荷质比,具有高灵敏度和高选择性.根据这一原理,针对气体传感器的需求,设计了硅悬臂梁谐振器化学传感器结构,进行了仿真优化,并采用MEMS表面牺牲层工艺制备该器件,激光频率仪测量验证了该微型谐振梁的谐振频率.
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| 关 键 词： | MEMS 气体传感器 荷质比 牺牲层工艺 MEMS micro gas sensor charge-to-mass ratio sacrificial layer technology 悬臂梁 谐振器 气体传感器 Gas Sensor Novel Resonator Beam Silicon resonant frequency microbeam sacrificial layer system technology simulated Structures High selectivity sensitivity gas detection measuring |
| 文章编号： | 0253-4177(2006)04-0658-04 |
| 收稿时间： | 12 9 2005 12:00AM |
| 修稿时间： | 2005年12月9日 |
Design of a Silicon Beam Resonator for a Novel Gas Sensor |
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| Hao Yilong,Xu Jiaji,Zhang Guobing,Wu Guoying,Yan Guizhen.Design of a Silicon Beam Resonator for a Novel Gas Sensor[J].Chinese Journal of Semiconductors,2006,27(4):658-661. |
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| Authors: | Hao Yilong Xu Jiaji Zhang Guobing Wu Guoying and Yan Guizhen |
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| Affiliation: | National Key Laboratory of Micro/Nano-Fabrication Technology,Institute of Microelectronics,Peking University,Beijing 100871,China;National Key Laboratory of Micro/Nano-Fabrication Technology,Institute of Microelectronics,Peking University,Beijing 100871,China;National Key Laboratory of Micro/Nano-Fabrication Technology,Institute of Microelectronics,Peking University,Beijing 100871,China;National Key Laboratory of Micro/Nano-Fabrication Technology,Institute of Microelectronics,Peking University,Beijing 100871,China;National Key Laboratory of Micro/Nano-Fabrication Technology,Institute of Microelectronics,Peking University,Beijing 100871,China |
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| Abstract: | A new silicon beam resonator design for a novel gas sensor based on simultaneous conductivity and mass change measurement is investigated.High selectivity and sensitivity in gas detection can be obtained by measuring the charge-to-mass ratio of gas molecules.Structures of silicon beam resonators are designed,simulated,and optimized.This gas sensor is fabricated using sacrificial layer microelectronmechanical system technology,and the resonant frequency of the microbeam is measured. |
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| Keywords: | MEMS micro gas sensor charge-to-mass ratio sacrificial layer technology |
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