| MEMS微型NO2气体传感器的研究 |
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| 引用本文： | 刘鑫.MEMS微型NO2气体传感器的研究[J].传感器与微系统,2009,28(2):48-49. |
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| 作者姓名： | 刘鑫 |
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| 作者单位： | 黑龙江科技学院,计算机与信息工程学院,黑龙江,哈尔滨,150027 |
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| 摘 要： | 采用MEMS技术制作了硅基微型NO2气体传感器，选用高分子金属酞菁聚合物酞菁铜作为敏感膜，从半导体理论出发解释了酞菁铜的敏感机理。阐述了该传感器的结构与工艺流程，并测试了传感器的气敏特性、温度特性、响应时间和恢复时间等敏感特性。实验结果验证了酞菁铜对NO2气体的敏感性，该传感器可以检测到10^-6量级的NO2气体，且响应时间快。
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| 关 键 词： | 微机电系统 酞菁铜 气体传感器 二氧化氮 |
Research on MEMS NO_2 micro gas sensor |
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| LIU Xin.Research on MEMS NO_2 micro gas sensor[J].Transducer and Microsystem Technology,2009,28(2):48-49. |
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| Authors: | LIU Xin |
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| Affiliation: | LIU Xin(Computer , Information Engineering College,Heilongjiang Institute of Science , Technology,Harbin 150027,China) |
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| Abstract: | The NO2 gas sensor on silicon substrate is fabricated by microelectronic mechanical system(MEMS) technology with CuPc as the thin film.The sensitive mechanism is explained from the semiconductor theory.The configuration and technological process of the sensor are described.The sensitivity,temperature characteristic,response and recovery time are tested.Experiment results confirm with the nitrogen dioxide-sensitive mechanism of the sensor,and the MEMS sensor can respond to the 10-6 level of NO2 and has short... |
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| Keywords: | MEMS CuPc gas sensor NO2 |
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