| Studies of preparing method of nano grain metal—insulator film Cu：CaF2 |
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| 引用本文： | 赵子强,韦伦存,等.Studies of preparing method of nano grain metal—insulator film Cu：CaF2[J].核技术(英文版),1996,7(4):240-242. |
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| 作者姓名： | 赵子强 韦伦存 |
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| 作者单位： | [1]InstituteofHeavyIonPhysics,PekingUniversity,Beijing100871 [2]InstituteofHeavyIonPhysics,PekingUniversity |
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| 摘 要： | A machine to prepare nano grain metal-insulator films,for example Cu:CaF2 film,by meams of magnetron sputtering generating clusters and at the same time evaporating insulator medium,is introduced.This machine is sutable for almost all solied metal and semiconductor clusters.And with it,many kinds of function fiml series can be prepared.The size of cluster embedded in insulator is from 10 to 70nm,The Cu cluster and medium CaF2 are both polycrystalline structure.
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| 关 键 词： | 薄膜 纳米晶粒 磁子溅射 |
Studies of preparing method of nano grain metal-insulator film Cu:CaF_2 |
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| Zhao Zi-Qiang,Wei Lun-Cun,Wang Hao,Zhong Yun-Cheng and Lu Xi-Ting.Studies of preparing method of nano grain metal-insulator film Cu:CaF_2[J].Nuclear Science and Techniques,1996,7(4):240-242. |
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| Authors: | Zhao Zi-Qiang Wei Lun-Cun Wang Hao Zhong Yun-Cheng and Lu Xi-Ting |
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| Abstract: | A machine to prepare nano grain metal-insulator films,for example Cu:CaF2film,by means of magnetron sputtering generating clusters and at the same time evaporatinginsulator medium, is introduced.This machine is suitable for almost all solid metal andsemiconductor clusters.And with it,many kinds of function film series can be prepared.Thesize of cluster embedded in insulator is from 10 to 70urn.The Cu cluster and medium CaFZare both polycrystalline structure. |
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| Keywords: | Embedded cluster Crystalline structure Nano grains Film Megnetron sputtering Evaporating |
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