| 微构件所受超声辐射力理论研究 |
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| 引用本文： | 杨克己,张宝龙. 微构件所受超声辐射力理论研究[J]. 工程设计学报, 2004, 11(6): 316-320 |
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| 作者姓名： | 杨克己 张宝龙 |
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| 作者单位： | 浙江大学现代制造工程研究所，浙江杭州310027 |
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| 基金项目： | 国家自然科学基金资助项目(50375144). |
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| 摘 要： | 为了将超声波俘获技术应用到微机电系统中，以达到对微构件进行无损、非接触遥操纵的目的，开展了微构件在超声波场中所受辐射力的理论研究．计算机仿真结果表明：微构件的材料与尺寸、介质的密度、超声波的声学参数等都对微构件所受辐射力产生影响，同时，利用超声驻波场技术实现对微构件的操纵是可行的．
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| 关 键 词： | 微构件 操纵 超声波辐射力 声势井 |
| 文章编号： | 1006-754X(2004)06-0316-05 |
| 收稿时间： | 2004-12-28 |
| 修稿时间： | 2004-07-08 |
Theoretical research on ultrasonic radiation force of micro-components |
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| YANG Ke-ji,ZHANG Bao-long. Theoretical research on ultrasonic radiation force of micro-components[J]. Journal of Engineering Design, 2004, 11(6): 316-320 |
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| Authors: | YANG Ke-ji ZHANG Bao-long |
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| Affiliation: | Institute of Modern Manufacture Engineering，Zhejiang University，Hangzhou 310027，China |
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| Abstract: | In order to apply ultrasonic capturing techniques into MEMS and realize nondestructive and non-contact remote manipulation upon micro-component, this paper conducts theoretical research on radiation force acted on the micro-component in acoustic field. The results of computer simulation indicates that many factors, such as material, size of micro-component, density of medium, acoustic parameters of ultrasonic etc, will influence the radiation force on micro-component and it is feasible to implement manipulation on micro-component by exploiting the technology of acoustic standing waves. |
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| Keywords: | micro-component manipulation ultrasonic radiation force acoustic potential well |
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