| 与硅微电子技术相兼容的传感器和执行器微细加工技术 |
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| 引用本文： | 于梅芳. 与硅微电子技术相兼容的传感器和执行器微细加工技术[J]. 传感技术学报, 1995, 8(1): 45-51 |
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| 作者姓名： | 于梅芳 |
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| 作者单位： | 南京邮电学院!南京210003 |
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| 摘 要： | 本文较系统地介绍了与硅微电子技术相兼容的传感器和执行器微细加工技术，文中给出的异向腐蚀、键合、双面光刻和电解放电加工方法与装置在微小器件制造中具有实用价值。
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| 关 键 词： | 传感器 执行器 微细加工 硅 微电子技术 |
The Study of the Micro-Machining Techniques of Sensors andActuators Compatible with the Silicon Microelectronic Technology |
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| Yu Meifang. The Study of the Micro-Machining Techniques of Sensors andActuators Compatible with the Silicon Microelectronic Technology[J]. Journal of Transduction Technology, 1995, 8(1): 45-51 |
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| Authors: | Yu Meifang |
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| Affiliation: | Nanjing Institute of Posts and Telecomm. |
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| Abstract: | The miccro-machining techniques of sensors and actuators compatible withthe micro-electronic technology have been introduced systematiaclly in this paper, inwhich the methods and the equipments of the anisotropic etching, bonding, double sidephotolithography and electrochemical discharge machining have practical value in thefabrication of micro devices. |
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| Keywords: | micro device bonding electrochemical discharge |
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