| 计量型原子力显微镜的非线性误差及轴间耦合误差的校准 |
| |
| 引用本文： | 高思田,赵克功,王春艳.计量型原子力显微镜的非线性误差及轴间耦合误差的校准[J].仪器仪表学报,1999,20(5):441-445,450. |
| |
| 作者姓名： | 高思田 赵克功 王春艳 |
| |
| 作者单位： | 中国计量科学研究院,北京,100013 |
| |
| 摘 要： | 本文研究了原子力显微镜的计量校准问题，建立了校准的数学模型，这个数学模型可以用于各种ＳＰＭ的校准中。对于位移轴的非线性误差和耦合误差进行了校准，给出了校准后残余误差的测量结果。并对一块经过ＰＴＢ检定的样板进行了测量，测量结果表明对于３００ｎｍ的台阶高度，测量念头平均为１．１ｎｍ。
|
| 关 键 词： | 原子力显微镜 校准 非线性误差 轴间偶合误差 |
The Calibration of Non-linear Error and Cross-talk Error of the Metrological Atomic Force Microscope |
| |
| Gao Sitian,Zhao Kegong,Wang Chunyan.The Calibration of Non-linear Error and Cross-talk Error of the Metrological Atomic Force Microscope[J].Chinese Journal of Scientific Instrument,1999,20(5):441-445,450. |
| |
| Authors: | Gao Sitian Zhao Kegong Wang Chunyan |
| |
| Affiliation: | National Institute of Metrology Beijing 100013 |
| |
| Abstract: | This paper presents the calibration of Atomic Force Microscope. The calibration model has been built, which can be used in the calibration of various SPMs. The verifications of non linearity of axes and the cross talk between two axes have been developed. The residual errors after calibration have been given. One artifact measured in PTB has been measured in the system. The average measure bias is 1.1 nm for the 300 nm step height between our result and PTB's. |
| |
| Keywords: | Nanometrology AFM Verification |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
